AGC Chemicals Americas adds two new grades to its line of perfluoroelastomers
AFLAS® FFKM PM-5000 and FFKM PM-5500 perfluorinated elastomers are ideal for semiconductor plasma process applications because of their high temperature durability beyond 300 °C and excellent resistance to O2 and NF3 plasma. They also have a high molecular weight that enables greater hardness without using fillers, which can create unwanted particles.
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